Non-volatile semiconductor memory device with intrinsic charge trapping layer

ABSTRACT

A non-volatile semiconductor memory device includes a substrate, a first gate formed on a first region of a surface of the substrate, a second gate formed on a second region of the surface of the substrate, a charge storage layer filled between the first gate and the second gate, a first diffusion region formed on a first side of the charge storage layer, and a second diffusion region formed opposite the charge storage layer from the first diffusion region. The first region and the second region are separated by a distance sufficient for forming a self-aligning charge storage layer therebetween.

CROSS REFERENCE TO RELATED APPLICATIONS

This application is a division of application Ser. No. 12/633,780, filedon Dec. 8, 2009, which claims the benefit of U.S. ProvisionalApplication No. 61/230,099, filed on Jul. 30, 2009 and entitled“Semiconductor Non-volatile Memory,” the contents of all of which areincorporated herein by reference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to semiconductor non-volatile memory, andmore particularly to a non-volatile semiconductor memory device having acharge storage layer.

2. Description of the Prior Art

Non-volatile memory is a type of memory that retains information itstores even when no power is supplied to memory blocks thereof. Someexamples include magnetic devices, optical discs, flash memory, andother semiconductor-based memory topologies. Some forms of non-volatilememory have bits defined in fabrication, some may be programmed onlyonce (one time programmable ROM, OTP ROM), and other types may beprogrammed and reprogrammed many times over. As semiconductor memorytechnologies have matured, one advantage that has come out ofdevelopment of such technologies is the ability to integrate substantialamounts of memory cells in integrate circuits (ICs). However, it isdesirable that the memory cells be formed in the same process with theICs.

One goal of non-volatile memory devices is to fit increasing numbers ofmemory cells in smaller chip areas while utilizing the same fabricationprocess as other complementary metal-oxide-semiconductor (CMOS) devicesin the IC. One method for increasing the number of memory cells utilizes“charge storage structures” to form 2-bit non-volatile semiconductormemory transistors. Please refer to FIG. 1, which is a diagram of asemiconductor memory transistor 100 according to the prior art. Thesemiconductor memory transistor 100 is formed on a substrate, which hastwo implanted source/drain regions 157-1 and 157-2 and a channel region156. The channel region 156 and the implanted source/drain regions157-1, 157-2 are formed under a gate region 152, and two charge storagestructures 155-1 and 155-2 formed on either side of the gate region 152.The charge storage structures 155-1, 155-2 are made of a spacer materialthat has charge trapping properties, e.g. silicon-nitride or a high-kdielectric. The charge storage structure 155-2 is programmed by applyinga gate voltage VG of 5 Volts and a drain voltage V2 of 5 Volts, with asource voltage V1 of 0 Volts. Thus, channel hot electrons from thesource region 157-1 may enter the charge storage region 155-2 bytraveling through the channel region 156. To erase the charge storagestructure 155-2, a gate voltage VG of −5 Volts and a drain voltage V2 of−5 Volts may be applied, inducing band-to-band tunneling holes to enterthe charge storage structure 155-2.

Another technique for providing a CMOS non-volatile memory cell that isfabricated using standard CMOS processes is shown in FIG. 2, which is adiagram of a CMOS non-volatile memory cell 200 (“memory cell 200”hereinafter) according to the prior art. The memory cell 200 isfabricated on a substrate 202, has two source/drain regions 204-1 and204-2, and two poly gates 206-1 and 206-2 separated from the substrate202 by gate dielectric layers 208-1 and 208-2, respectively. The gatedielectric layers 208-1/208-2 are formed of oxide-nitride-oxide (ONO)material. A programming layer 210 is formed between the two poly gates206-1, 206-2, and is isolated from the two poly gates 206-1, 206-2 by anisolating layer 212. The programming layer 210 provides charge storagesimilar to a silicon-oxide-nitride-oxide-silicon (SONOS) structureutilized in flash memory cells. However, in the CMOS non-volatile memorycell 200, the two poly gates 206-1, 206-2 are utilized to program theprogramming layer 210. Silicon-nitride sidewall spacers 214-1 and 214-2are deposited with the programming layer 210 for controlling e-fieldfringing near the source/drain regions 204-1, 204-2. Sidewall isolatinglayers 216-1 and 216-2 are grown with the isolating layer 212, andisolate the SiN sidewall spacers 214-1, 214-2 from the poly gates 206-1,206-2 and the substrate 202. Second sidewall spacers 218-1, 218-2 areformed from silicon oxide. The programming layer 210 is programmed bygrounding the poly gate 206-1, and leaving the source/drain regions204-1, 204-2 and substrate 202 floating. A high voltage is applied tothe poly gate 206-2 to attract electrons from the poly gate 206-1 intothe programming layer 210 through the isolating layer 212. The negativecharge of the programming layer 210 over the channel causes a negativebias, increasing threshold voltage of the memory cell 200 relative tonon-programmed transistors in the same circuit.

Many various topologies are provided in the prior art for forming memorycells with charge storage layers. However, the memory cells are slow andinefficient.

SUMMARY OF THE INVENTION

According to an embodiment of the present invention, a non-volatilesemiconductor memory device comprises a substrate of a firstconductivity type comprising an active region, a select gate, a firstgate, a second gate, a charge storage layer filled between the firstgate and the second gate, a first diffusion region, and a seconddiffusion region. The select gate is formed fully on the active region.The first gate is formed partially on the active region on a side of theselect gate, and is separated from the select gate by a first distance.The second gate is formed partially on the active region on the side ofthe select gate. The select gate and the second gate are separated bythe first distance, and the first gate and the second gate are separatedby a second distance. The charge storage layer is formed on a surface ofthe active region, fills between the first gate and the second gate, andfurther between the select gate, the first gate and the second gate. Thefirst diffusion region is of a second conductivity type opposite thefirst conductivity type, and is formed on the surface of the activeregion on a first side of the charge storage layer opposite the selectgate from the charge storage layer. The second diffusion region is ofthe second conductivity type, and is formed on the surface of the activeregion on a second side of the charge storage layer opposite the chargestorage layer from the first side.

According to an embodiment of the present invention, a non-volatilememory string comprises a substrate of a first conductivity typecomprising an active region, a select gate formed fully on the activeregion, a first diffusion region formed on the surface of the activeregion on a first side of the select gate, and at least one memory unitformed on a second side of the select gate opposite the first side. Thefirst diffusion region is of a second conductivity type opposite thefirst conductivity type. Each memory unit comprises a first gate formedpartially on the active region on the second side of the select gate, asecond gate formed partially on the active region on the second side ofthe select gate, a charge storage layer formed on a surface of theactive region filled between the first gate and the second gate, asecond diffusion region of the second conductivity type formed on thesurface of the active region on the first side of the charge storagelayer, and a third diffusion region of the second conductivity typeformed on the surface of the active region on the second side of thecharge storage layer. The first gate and a second gate of a first memoryunit of the at least one memory unit are separated from the select gateby a first distance, and are separated from each other by a seconddistance in a direction perpendicular to the first distance. First andsecond gates of each successive memory unit of the at least one memoryunit after the first memory unit are separated from a first gate and asecond gate of a previous memory unit by the first distance, and areseparated from each other by a second distance in the directionperpendicular to the first distance. A second diffusion region of eachsuccessive memory unit of the at least one memory unit is a thirddiffusion region of the previous memory unit.

According to an embodiment of the present invention, a non-volatilememory array comprises a substrate of a first conductivity typecomprising a plurality of active regions, and a plurality of memorystrings. Each memory string of the plurality of memory strings comprisesa select gate formed fully on one active region of the plurality ofactive regions, a first diffusion region of a second conductivity typeopposite the first conductivity type formed on the surface of the activeregion on a first side of the select gate, and at least one memory unitformed on a second side of the select gate opposite the first side. Eachmemory unit comprises a first gate formed partially on the active regionon the second side of the select gate, a second gate formed partially onthe active region on the second side of the select gate, a chargestorage layer formed on a surface of the active region filled betweenthe first gate and the second gate, a second diffusion region of thesecond conductivity type formed on the surface of the active region onthe first side of the charge storage layer, and a third diffusion regionof the second conductivity type formed on the surface of the activeregion on the second side of the charge storage layer. A first gate anda second gate of a first memory unit of the at least one memory unit areseparated from the select gate by a first distance, and are separatedfrom each other by a second distance in a direction perpendicular to thefirst distance. First and second gates of each successive memory unit ofthe at least one memory unit after the first memory unit are separatedfrom a first gate and a second gate of a previous memory unit by thefirst distance, and from each other by a second distance in thedirection perpendicular to the first distance. A second diffusion regionof each successive memory unit of the at least one memory unit is athird diffusion region of the previous memory unit.

According to an embodiment of the present invention, a non-volatilememory array comprises a substrate of a first conductivity type, aplurality of active regions on the substrate, and a plurality of memorycells, each memory cell formed on one active region of the plurality ofactive regions. Each memory cell comprises a select gate formed fully onthe one active region, a first gate formed partially on the activeregion on a first side of the select gate, a second gate formedpartially on the one active region on the first side of the select gate,a charge storage layer formed between the first gate and the secondgate, a first diffusion region of a second conductivity type oppositethe first conductivity type formed on the surface of the active region,a second diffusion region of the second conductivity type opposite thefirst conductivity type formed on the surface of the active region, anda third diffusion region of the second conductivity type opposite thefirst conductivity type formed on the surface of the active regionbetween the select gate and the first gate, the charge storage layer,and the second gate. The select gate and the first gate are separated bya first distance. The second gate and the select gate are separated bythe first distance. The first gate and the second gate are separated bya second distance. The first diffusion region and the second gate areformed on opposite sides of the select gate. The second diffusion regionand the first gate are formed on opposite sides of the second gate.First diffusion regions of the plurality of memory cells areelectrically connected to each other, and second diffusion regions ofthe plurality of memory cells are electrically connected to each other.

These and other objectives of the present invention will no doubt becomeobvious to those of ordinary skill in the art after reading thefollowing detailed description of the preferred embodiment that isillustrated in the various figures and drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a diagram of a semiconductor memory transistor according tothe prior art.

FIG. 2 is a diagram of a CMOS non-volatile memory cell according to theprior art.

FIG. 3 is a diagram of a complimentary metal-oxide-semiconductornon-volatile memory cell according to one embodiment of the presentinvention.

FIG. 4 is a cross-sectional diagram of the CMOS non-volatile memory cellalong line 4-4′ of FIG. 3 in program mode.

FIG. 5 is a diagram of the CMOS non-volatile memory cell of FIG. 4 inerase mode.

FIG. 6 is a diagram of a complimentary metal-oxide-semiconductornon-volatile memory cell showing sidewall spacers.

FIG. 7 is a diagram of a complimentary metal-oxide-semiconductornon-volatile memory cell according to another embodiment of the presentinvention.

FIG. 8 is a diagram of an array of complimentarymetal-oxide-semiconductor non-volatile memory cells according to anembodiment of the present invention.

DETAILED DESCRIPTION

Please refer to FIG. 3, which is a diagram of a complimentarymetal-oxide-semiconductor (CMOS) non-volatile memory cell 300(hereinafter “the memory cell 300”) according to one embodiment of thepresent invention. The memory cell 300 may be formed over an activeregion 315 in a P-well region 310 of a substrate. Although P-welltopology CMOS is described, the embodiments described herein are alsosuitable for application to N-well topology CMOS. A first N+ diffusionregion 311-1 may be formed under a first polysilicon gate 313-1, and asecond N+ diffusion region may be formed under a second polysilicon gate313-2 and a third polysilicon gate 313-3.

The second polysilicon gate 313-2 and the third polysilicon gate 313-3may be formed a first distance apart from each other. Further, thesecond polysilicon gate 313-2 and the third polysilicon gate 313-3 mayboth be formed a second distance apart from the first polysilicon gate313-1. The first distance and the second distance may be of sizessuitable for forming self-aligning nitride (SAN) layers in a spacebetween the first, second, and third polysilicon gates 313-1, 313-2,313-3. For example, in a 90 nm/65 nm node, a range of 20 nm to 200 nm ofseparation between the first polysilicon gate 313-1 and the second andthird polysilicon gates 313-2, 313-3, as well as between the secondpolysilicon gate 313-2 and the third polysilicon gate 313-3, may allowformation of a charge storage layer 314, e.g. a SAN layer, in the spacebetween the first, second, and third polysilicon gates 313-1, 313-2,313-3. Contacts 316-1 and 316-2 may be formed in the active region 315over the diffusion regions 311-1 and 311-2, respectively, for chargingthe diffusion regions 311-1, 311-2 with voltage signals applied to thecontacts 316-1, 316-2. A lightly-doped drain (LDD) block region may alsobe formed in and surrounding a region of the substrate over which thefirst, second, and third polysilicon gates 313-1, 313-2, 313-3 and theSAN layer 314 are formed.

Please refer to FIG. 4, which is a cross-sectional diagram of the CMOSnon-volatile memory cell 300 along line 4-4′ of FIG. 3. FIG. 4 shows thememory cell 300 in program mode. A first oxide layer 320 may be formedbetween the first polysilicon gate 313-1. In program mode, for an N-typeMOSFET, a gate voltage of approximately a threshold voltage V_(TH) ofthe memory cell 300 may be applied to the polysilicon gate 313-1, a highvoltage may be applied to the diffusion region 311-2 (“second diffusionregion”), and the diffusion region 311-1 (“first diffusion region”) maybe grounded. In this way, channel hot electrons may travel from thefirst diffusion region 311-1 through a channel region formed between thetoward the second diffusion region 311-2. Likewise, holes may travelfrom the second diffusion region 311-2 toward the P-well 310. Thechannel hot electrons may be injected into the SAN layer 314 through asecond oxide layer 321 formed between the SAN layer 314 and thesubstrate. Addition of the second and third polysilicon gates 313-2,313-3 may couple high voltage to sidewall spacers 317-1, 317-2, 317-3(see FIG. 6) adjacent the SAN layer 314, which may greatly enhancechannel hot electron injection efficiency. The sidewall spacers 317-1,317-2, 317-3 may be formed of oxide grown on the substrate and thesecond and third polysilicon gates 313-2, 313-3. Further, peak channelhot electron injection may be shifted to an edge of the second diffusionregion 311-2 under the SAN layer 314, and current density may beenhanced by applying voltage to the second and third polysilicon gates313-2, 313-3.

Please refer to FIG. 5, which is a diagram of the CMOS non-volatilememory cell 300 of FIG. 4 in erase mode. Band-to-band tunneling hot hole(BBHH) injection may be utilized to erase the memory cell 300. As shownin FIG. 5, a low voltage, e.g. <0 Volts, may be applied to the firstpolysilicon gate 313-1, and a SAN layer voltage VN, e.g. <0 Volts, maybe coupled to the sidewall spacers 317-1, 317-2, 317-3 next to the SANlayer 314 by the second and third polysilicon gates 313-2, 313-3. A highvoltage may be applied to the second diffusion region 311-2. In thisway, BBHH injection may occur, such that hot holes may travel from thesecond diffusion region 311-2 to the SAN layer 314 through the oxidelayer 321. Likewise, electrons may travel toward the P-well 310 due tothe low voltage coupled through the sidewall spacers 317-1, 317-2, 317-3by the second and third polysilicon gates 313-2, 313-3. Thus, hot holeinjection current may be enhanced due to an external vertical electricfield in the sidewall spacers 317-1, 317-2, 317-3 induced through thesecond and third polysilicon gates 313-2, 313-3.

Thus, it can be seen that through addition of the second and thirdpolysilicon gates 313-2, 313-3, the memory cell 300 has enhanced currentdensity in both program and erase modes, which improves performance ofthe memory cell 300 over the prior art. Further, in simulation, thememory cell 300 exhibits an acceptable program/erase window under 2Volts operation.

Please refer to FIG. 7, which is a diagram of a complimentarymetal-oxide-semiconductor non-volatile memory cell 700 (hereinafter “thememory cell 700”) according to another embodiment of the presentinvention. The memory cell 700 may be formed over an active region 715in a P-well region 710 of a substrate. A first N+ diffusion region 711-1may be formed under a first polysilicon gate 713-1, and a second N+diffusion region may be formed under a second polysilicon gate 713-2 anda third polysilicon gate 713-3.

The second polysilicon gate 713-2 and the third polysilicon gate 713-3may be formed a first distance apart from each other. Further, thesecond polysilicon gate 713-2 and the third polysilicon gate 713-3 mayboth be formed a second distance apart from the first polysilicon gate713-1. The second distance and the first distance may be measured alongperpendicular axes. The first polysilicon gate 713-1 may be wider thanthe second and third polysilicon gates 713-2, 713-3. The first distancemay be of a size suitable for forming a self-aligning nitride (SAN)layer 714 in a space between the second and third polysilicon gates713-2, 713-3, and the second distance may be of a size suitable for notforming an SAN layer between the first polysilicon gate 713-1 and thesecond and third polysilicon gates 713-2, 713-3. For example, in a 90nm/65 nm node, a range of 20 nm to 200 nm of separation between thesecond and third polysilicon gates 713-2, 713-3 may allow formation of acharge storage layer 714, e.g. the SAN layer, in the space between thesecond and third polysilicon gates 713-2, 713-3. Contacts 716-1 and716-2 may be formed in the active region 715 over the diffusion regions711-1 and 711-2, respectively, for charging the diffusion regions 711-1,711-2 with voltage signals applied to the contacts 716-1, 716-2.

Please refer to FIG. 8, which is a diagram of an array 800 ofcomplimentary metal-oxide-semiconductor non-volatile memory cellsaccording to an embodiment of the present invention. The array of memorycells 800 may be considered a logical NAND type array comprising aplurality of memory cells in a memory string. Each memory string maycomprise a plurality of memory cells as shown in FIG. 8. The memorycells 800 may be formed over an active region 815 in a P-well region 810of a substrate. As shown in FIG. 8, a total number N memory cells may beformed. A first N+ diffusion region 811-1 may be formed under a firstpolysilicon gate 813-1. A second N+ diffusion region 811-2 may be formedunder the first polysilicon gate 813-1 and second and third polysilicongates 813-2 [1], 813-3 [1]. A third N+ diffusion region 811-3 may beformed under the second and third polysilicon gates 813-2 [1], 813-3 [1]and under fourth and fifth polysilicon gates 813-2 [2], 813-3 [2]. Afourth N+ diffusion region 811-4 may be formed under sixth and seventhpolysilicon gates 813-2 [N], 813-3 [N]. To form a continuous channelbetween the first N+ diffusion region 811-1 and the fourth N+ diffusionregion 811-4, each charge storage layer 814 [1], 814 [2], . . . , 814[N] may store charges, e.g. electrons. If one or more of the chargestorage layers 814 [1], 814 [2], . . . , 814 [N] does not store charges,current may not pass from the first N+ diffusion region 811-1 to thefourth N+ diffusion region 811-4. Thus, NAND-type operation may beachieved through use of the architecture shown in FIG. 8.

The second polysilicon gate 813-2 [1] and the third polysilicon gate813-3 [1] may be formed a first distance apart from each other. Further,the second polysilicon gate 813-2 [1] and the third polysilicon gate813-3 [1] may both be formed a second distance apart from the firstpolysilicon gate 813-1. The fourth polysilicon gate 813-2 [2] and thefifth polysilicon gate 813-3 [2] may be formed the first distance apartfrom each other. The fourth polysilicon gate 813-2 [2] may be formed athird distance apart from the second polysilicon gate 813-2 [1]. Thefifth polysilicon gate 813-3 [2] may be formed the third distance apartfrom the third polysilicon gate 813-3 [1]. The third distance may be thesame as the second distance. The first distance may be of a sizesuitable for forming the self-aligning nitride (SAN) layers 814 [1], 814[2], . . . , 814 [N] in spaces between the second and third polysilicongates 813-2 [1], 813-3 [1], fourth and fifth polysilicon gates 813-2[2], 813-3 [2], through the sixth and seventh polysilicon gates 813-2[N], 813-3 [N]. The second distance may be of a size suitable for notforming an SAN layer between the first polysilicon gate 813-1 and thesecond and third polysilicon gates 813-2 [1], 813-3 [1]. The thirddistance may be of a size suitable for not forming an SAN layer betweenthe second and third polysilicon gates 813-1 [1], 813-3 [1] and thefourth and fifth polysilicon gates 813-2 [2], 813-3 [2], respectively.For example, in a 90 nm/65 nm node, a range of 20 nm to 200 nm ofseparation between the second and third polysilicon gates 813-2 [1],813-3 [1] may allow formation of a charge storage layer 814 [1], e.g.the SAN layer, in the space between the second and third polysilicongates 813-2 [1], 813-3 [1]. Contacts 816-1 and 816-2 may be formed inthe active region 815 over the diffusion regions 811-1 and 811-4,respectively, for charging the diffusion regions 811-1, 811-4 withvoltage signals applied to the contacts 816-1, 816-2.

The above description of FIG. 8 relates to a NAND-type arrayconfiguration. A NOR-type array configuration is also described hereinas follows. A NOR-type array may comprise a plurality of memory cells,each configured as the memory cell 300 or the memory cell 700. Takingthe memory cell 700 as an example, each first diffusion region 711-1 maybe electrically connected to other first diffusion regions 711-1 ofother memory cells of the NOR-type array, and each second diffusionregion 711-2 may be electrically connected to other second diffusionregions 711-2 of the other memory cells of the NOR-type array. In such aconfiguration, if one or more charge storage layers 714 corresponding toone or more memory cells of the NOR-type array is charged, forming oneor more channels from the first diffusion region 711-1 to the seconddiffusion region 711-2 of the one or more memory cells, current maytravel through the channel from the first diffusion region 711-1 to thesecond diffusion region 711-2. Thus, logical NOR-type operation may beaccomplished in the NOR-type array.

Thus, it can be seen that the memory cell 700 has enhanced currentdensity through the SAN layer 714, which improves performance of thememory cell 700 over the prior art. Likewise, the array of memory cells800 and the NOR-type array benefit from the SAN layers described abovein a similar manner.

Those skilled in the art will readily observe that numerousmodifications and alterations of the device and method may be made whileretaining the teachings of the invention. Accordingly, the abovedisclosure should be construed as limited only by the metes and boundsof the appended claims.

1. A non-volatile semiconductor memory device comprising: a substrate ofa first conductivity type comprising an active region; a select gateformed fully on the active region; a first gate formed partially on theactive region on a side of the select gate, wherein the select gate andthe first gate are separated by a first distance; a second gate formedpartially on the active region on the side of the select gate, whereinthe select gate and the second gate are separated by the first distance,and the first gate and the second gate are separated by a seconddistance; a charge storage layer formed on a surface of the activeregion, the charge storage layer filled between the first gate and thesecond gate, and further between the select gate, the first gate and thesecond gate; a first diffusion region of a second conductivity typeopposite the first conductivity type formed on the surface of the activeregion on a first side of the charge storage layer opposite the selectgate from the charge storage layer; and a second diffusion region of thesecond conductivity type formed on the surface of the active region on asecond side of the charge storage layer opposite the charge storagelayer from the first side.
 2. A non-volatile memory string comprising: asubstrate of a first conductivity type comprising an active region; aselect gate formed fully on the active region; a first diffusion regionof a second conductivity type opposite the first conductivity typeformed on the surface of the active region on a first side of the selectgate; and at least one memory unit formed on a second side of the selectgate opposite the first side, each memory unit comprising: a first gateformed partially on the active region on the second side of the selectgate; a second gate formed partially on the active region on the secondside of the select gate; a charge storage layer formed on a surface ofthe active region filled between the first gate and the second gate; asecond diffusion region of the second conductivity type formed on thesurface of the active region on the first side of the charge storagelayer; and a third diffusion region of the second conductivity typeformed on the surface of the active region on the second side of thecharge storage layer; wherein a first gate and a second gate of a firstmemory unit of the at least one memory unit are separated from theselect gate by a first distance, and are separated from each other by asecond distance in a direction perpendicular to the first distance;wherein a first gate and a second gate of each successive memory unit ofthe at least one memory unit after the first memory unit are separatedfrom a first gate and a second gate of a previous memory unit by thefirst distance, and the first gate and the second gate of eachsuccessive memory unit are separated from each other by a seconddistance in the direction perpendicular to the first distance; wherein asecond diffusion region of each successive memory unit of the at leastone memory unit is a third diffusion region of the previous memory unit.3. The non-volatile memory array of claim 2, wherein each charge storagelayer of each memory unit further fills between the select gate, thefirst gate and the second gate of the memory unit.
 4. A non-volatilememory array comprising: a substrate of a first conductivity typecomprising a plurality of active regions; and a plurality of memorystrings, each memory string of the plurality of memory stringcomprising: a select gate formed fully on one active region of theplurality of active regions; a first diffusion region of a secondconductivity type opposite the first conductivity type formed on thesurface of the active region on a first side of the select gate; and atleast one memory unit formed on a second side of the select gateopposite the first side, each memory unit comprising: a first gateformed partially on the active region on the second side of the selectgate; a second gate formed partially on the active region on the secondside of the select gate; a charge storage layer formed on a surface ofthe active region filled between the first gate and the second gate; asecond diffusion region of the second conductivity type formed on thesurface of the active region on the first side of the charge storagelayer; and a third diffusion region of the second conductivity typeformed on the surface of the active region on the second side of thecharge storage layer; wherein a first gate and a second gate of a firstmemory unit of the at least one memory unit are separated from theselect gate by a first distance, and are separated from each other by asecond distance in a direction perpendicular to the first distance;wherein a first gate and a second gate of each successive memory unit ofthe at least one memory unit after the first memory unit are separatedfrom a first gate and a second gate of a previous memory unit by thefirst distance, and the first gate and the second gate of eachsuccessive memory unit are separated from each other by a seconddistance in the direction perpendicular to the first distance; wherein asecond diffusion region of each successive memory unit of the at leastone memory unit is a third diffusion region of the previous memory unit.5. The non-volatile memory array of claim 4, wherein each charge storagelayer of each memory unit further fills between the select gate, thefirst gate and the second gate of the memory unit.
 6. A non-volatilememory array comprising: a substrate of a first conductivity type; aplurality of active regions on the substrate; and a plurality of memorycells, each memory cell formed on one active region of the plurality ofactive regions, each memory cell comprising: a select gate formed fullyon the one active region; a first gate formed partially on the activeregion on a first side of the select gate, wherein the select gate andthe first gate are separated by a first distance; a second gate formedpartially on the one active region on the first side of the select gate,wherein the second gate and the select gate are separated by the firstdistance, and the first gate and the second gate are separated by asecond distance; a charge storage layer formed between the first gateand the second gate; a first diffusion region of a second conductivitytype opposite the first conductivity type formed on the surface of theactive region, wherein the first diffusion region and the second gateare formed on opposite sides of the select gate; a second diffusionregion of the second conductivity type formed on the surface of theactive region, wherein the second diffusion region and the select gateare formed on opposite sides of the first gate; and a third diffusionregion of the second conductivity type formed on the surface of theactive region between the select gate and the first gate, the chargestorage layer, and the second gate; wherein first diffusion regions ofthe plurality of memory cells are electrically connected to each other,and second diffusion regions of the plurality of memory cells areelectrically connected to each other.
 7. The non-volatile memory arrayof claim 6, wherein each charge storage layer of each memory unitfurther fills between the select gate, the first gate and the secondgate of the memory unit.